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MEMSnet Home: MEMS-Talk: ti/pt heater
ti/pt heater
2003-08-25
zaini halim
ti/pt heater
zaini halim
2003-08-25
Hi all!

I am doing a researh in microhotplate area. I have a
few questions regarding this area:

1) Does anybody know which one is better, polysilicon
heater or ti/pt heater?

2) How to fabricate the ti/pt heater. Is it deposit
platinum first and after that deposit titanium?

Thank you.

Zaini

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