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MEMSnet Home: MEMS-Talk: AlGaAs/GaAs mirror etch
AlGaAs/GaAs mirror etch
2003-08-25
Changping
2003-08-25
R. Brent Garber (2 parts)
2003-08-25
transene
2003-08-25
Philip D. Floyd
AlGaAs/GaAs mirror etch
Changping
2003-08-25
Hi,

Can anyone suggest a dry etch recipe of AlGaAs/GaAs DBR mirror? What gases
are needed?

Thanks!


Changping
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