Dear MEMS people
I'm a newcomer in the MEMS/LIGA field.
Does anyone know what is the microroughness of a PMMA
surface, after exposition to Syncrotron radiation and
development, in a LIGA process ?
I know that the surfaces produced look as though they can be
useful in optics applications but I have no info on the quality
of the surface.

Thanks in advance,

Mauro Ghigo
Osservatorio Astronomico di Brera
Via Bianchi 46 - 23807 Merate (Lc) - Italy
TEL. +39-39-999111, FAX. +39-39-9991160
E-mail    [email protected]