Nominal parameters for SU-8 can be found in the datasheets on the right
hand side of this page:

http://www.microchem.com/products/su_eight.htm

You will probably have to tweak them, but they are a good starting
point.

I've never used AZP4620.

Greg Reimann
Boston University
Precision Engineering Research Lab

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Ramparsad Khosla
Sent: Monday, September 22, 2003 11:11 PM
To: General MEMS discussion
Subject: [mems-talk] PHOTORESIST

Hi

Can anyone help me get the proper parameters to working with photoresist
like AZP4620 and SU-8?

Thanks a lot

KHOSLA Vicky
NUS Undergrad

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