Hi all,

I'm working in a membrane structure with silicon oxide supports.
I would like to know if any of you have any information, any report or paper,
about problems of adhesion between Thin Silicon Nitride Films on Silicon Oxide.
If we have a membrane hanging from silicon oxide at the borders, will it hold?
or this is impossible or at least difficult to elaborate.

I will appreciate any help, after spending quite some time searching the talk
archives I couldn't find any reference to it.
Thanks,

Juan Pablo Saenz
Thin Film Lab
Cryogenic Electronics Group