Yilei-

AFMs can generally measure polysilicon grain size quite well.

Regards-

Trisha



-----Original Message-----
From: Yilei Zhang [mailto:[email protected]]
Sent: Tuesday, September 30, 2003 4:47 PM
To: [email protected]
Subject: [mems-talk] polysilicon grain size measurement

Dear Members:
Is it possible to measure polysilicon grain size using XRD? It looks that
only
qualitative results can be achieved. How to get quantitative results, for
example, 40nm?

If XRD cannot, any other methods? thanks.

Regards,
Yilei Zhang










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