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MEMSnet Home: MEMS-Talk: depositing gold layer using e-beam evaporater
depositing gold layer using e-beam evaporater
2003-10-02
usual_suspects
2003-10-02
Mighty Platypus
2003-10-02
Buncick, Milan (Contractor-AEgis TG)
2003-10-02
Michael D Martin
depositing gold layer using e-beam evaporater
usual_suspects
2003-10-02
currently im having problems getting a good contact
for gold layer with silicon coated with chromium as it
peel off easily.i deposited the gold layer using
e-beam evaporater and it started well but when i tried
to pick up the wafer, the gold layer deposited on it
seems to peel off very easily. Is there any way to
make a better contact for the gold layer and silicon
coated with chromium or will just annealing do the job
of making the gold layer stick better. Thankx

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