> I would like to know if :
> - there is any incompatibility between KI2 (Gold
etch)
> and silicon dioxide, or B-HF and Gold.
KI2 should not attack Si02 nor Pt or Ti, and BHF does
not attack gold.

> - there is any incompatibility between
> platinum/titanum and BHF.
However, there will be attack of Ti by BHF
and it could be accelerated by the presence of a Pt
couple. I have measured some acceleration of Ti attack
by BHF in the presence of a Au couple. If Ti is the
adhesion layer it could be undercut by a long BHF
release.
don't know if this helps.

regards,
Dave Kharas Ph.D.
[email protected]

> Thanks
>
> Delphine Meunier


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