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MEMSnet Home: MEMS-Talk: Gold etchant and SiO2
Gold etchant and SiO2
2003-10-02
delphine meunier
looking for double-side aligner.
2003-10-02
il-seok Son
2003-10-02
Mighty Platypus
2003-10-02
Michael D Martin
2003-10-03
Sampo Tuukkanen
Gold etchant and SiO2
Mighty Platypus
2003-10-02
On Thu, 2 Oct 2003, delphine meunier wrote:

> Hi,
>
Howdy.

> I would like to know if :
> - there is any incopatiblity between KI2 (Gold etch) and silicon dioxide, or
B-HF and Gold.

They have been compatible in my experience. If you're dipping the gold for
a long time (more than 5 minutes), I wouldn't know exactly.

> - there is any incompatibility between platinum/titanum and BHF.
>
BHF etches Titanium rather quickly. If you can use chrome as an adhesion
layer, it is considerably more resistant. I'm not certain about the
platinum, but I assume it is similarly resistant as gold. I know we had to
use aqua regia to etch platinum when working with it here.

> Thanks
>
You're welcome. I hope this is helpful.

> Delphine Meunier
>
>
Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain




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