Dear MEMS readers,

since quite a time the liquid carbon dioxide is used for release of
minute structures. In the recent times, the cleaning potential of this
super fluid liquid was also discovered. Do you know a site, where such
an installation is that provides service and/or sample cleaning?
Best regards and thank you for your help,

--
Erik Jung
FhG-IZM
Gustav-Meyer-Allee 25
D-13355 Berlin
Germany
Phone: +49-30-46403-230
Fax: +49-30-46403-161
email: [email protected]