Does your process allow you to use an oxygen plasma? If so thats your
next step.

-Mike


>>> [email protected] 10/2/2003 5:00:31 PM >>>
Dear Members:
I have some samples with photoresist (AZ5209) coating for a long time,
now i cannot
remove it by aceton, stripper, or ultrasonic cleaner. Can anyone give
me some
suggestions? Thanks.

Regards,
Yilei Zhang










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