Hi Yilei,
the best place to start with polysilicon is
the book by T. Kamins, "Polycrystalline Silicon for
Integrated Circuits and Displays 2nd ed." Kluwer 1998.
there are many many excellent papers on polysi, that
discuss everything from microstructure to stress..
etc..
P. Joubert, B. Loisel, Y. Chouan, and L. Haji,
The Effect of Low Pressure on the
Structure of LPCVD Polycrystalline Silicon Films, J.
of the Electrochemical Society, 134 (10), 1987 p.
2541-2545.
P. Krulevitch, T. Nguyen, G. Johnson, R. Howe, H.
Wenk, and R. Gronsky, LPCVD Polycrystalline Silicon
Thin Films: The Evolution of Structure, Texture
and Stress, Materials Research Society Symposium
Proceedings, 202, 1991, p.167-172.
P. Krulevitch, G. Johnson, R. Howe, Stress and
Microstructure in LPCVD Polycrystalline Silicon Thin
Films: Experimental Results and Closed Form
Modeling of Stress, Materials Research Society
Symposium Proceedings, 239, 1992, p.13-18.
W. Sharpe, B. Yuan, and R. Edewrds, Fracture
Tests of Polysilicon Film, Materials
Research Society Symp. Proc., 505, 1998, p. 51-56.
there are many good papers by Sharpe on polysi
and many many more..
As far as grain size measurement goes; cross sectional
and plan view TEM is by far the best way to go,
but also the most difficult and expensive. AFM is very
good as well but will only give you a view of the
surface grain size which could be misleading, and can
also give you a measure larger than reality due to tip
limitations. Some glancing angle Xray techniques will
also be effective, however the facilities are rather
specialized. I've sent some samples previously to
AMIA labs with good results.
here is their contact info:
http://www.rigakumsc.com/contract/amia.jsp
good luck..
dave kharas ph.d.
[email protected]
From: "Yilei Zhang"
Subject: [mems-talk] book about grain size measurement
Date: Fri, 3 Oct 2003 23:36:01 -0500 (CDT)
To: [email protected]
Dear Members:
Can anyone recomment some books/papers about
polysilicon grain size
measurement?
Now I am trying XRD and AFM. Thanks.
Regards,
Yilei Zhang
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