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MEMSnet Home: MEMS-Talk: MEMS Process Flow chart
MEMS Process Flow chart
2003-10-08
Trisha Browne
2003-10-09
Kirt & Erika Zipf-Williams
MEMS Process Flow chart
Kirt & Erika Zipf-Williams
2003-10-09
> I am looking for a MEMS Processing Flow chart that I can use in a
> presentation.  Does anyone have any recommendations?
> Trisha
> Patricia Browne
> Veeco Metrology

Look in Nadim Maluf's book, "In Introduction to Microelectromechanical
Systems Engineering."
There are a few commercial process flows.




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