Hello Sir:
        we are developing the process to remove TiW with H2O2，the temperature is
30 centigrade, Can you tell us the reaction formular? such as  TiW+H2O2=?

        Thank you very much!






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TiW is typically 90% W and 10% W.
H2O2 oxidizes the W, then the oxide is dissolved in solution.
The remaining Ti would also be oxidized and probably remains in solution as tiny
particles.
See Meerakker et al., "The etcing of Ti-W in concentrated H2O2 solutions,"
Thin Solid Films, vol 208, no. 2, Feb. 1992, p. 237-242.

    --Kirt Williams, Ph.D.   consultant