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MEMSnet Home: MEMS-Talk: Electronic Visions - EV-420 mask aligner
Electronic Visions - EV-420 mask aligner
2003-10-10
Greg Dittami
Electronic Visions - EV-420 mask aligner
Greg Dittami
2003-10-10
Does anyone know of a consultant with expertise in fixing this type of
aligner?  We are having some difficulty with it in that, periodically,
the wafer doesn't planarize with the mask.  So far, we haven't had much
success in getting help from Electronic Visions.


Greg Dittami
University of Utah
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