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MEMSnet Home: MEMS-Talk: radiant heater or quartz tube infrared heater for vacuum
Looking for Vacuum Chamber
2003-10-09
Michael Whitley
radiant heater or quartz tube infrared heater for vacuum
2003-10-10
Honggang Jiang
radiant heater or quartz tube infrared heater for vacuum
2003-10-13
RobDavis
2003-10-13
Michael Barger
radiant heater or quartz tube infrared heater for vacuum
Honggang Jiang
2003-10-10
Dear all:

I need to install a radiant heater inside the vacuum system to heat up the
substrate for e-beam evaporation. the vacuum is about 10E-6torr, and the
temperature of the substrate about 300oC. Could anybody provide some information
regarding who make the heaters, as well as the power supplies? Thanks a lot.

Best regards

Honggang Jiang, PhD

Materials Science Engineer

Second Sight

12744 San Fernando Road

Building 3

Sylmar, CA 91342

Ph: 818 833 5058

Fx: 818 833 5067


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