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MEMSnet Home: MEMS-Talk: polishing of silicon
polishing of silicon
2003-10-10
sandhya
2003-10-13
Kim Norris
polishing of silicon
sandhya
2003-10-10
Hello all,
Can anyone say what are chemicals usually used to polish ultra thin surfaces and
where can I find papers or journals related to this topic.
Thanks
sandhya


Sandhya Reddy
Research assistant
Boise state university
Ph.No. 208-426-5639

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