Hi !

I want to know the  parameters like diffusion coefficients of HF and HNO3
,concentration constants  involved ,order of reaction between HNA and Si , below
is the chemical reaction ,

Si + 6HF + HNO3  ----->  H2SiF6 + +HNO2 + H20 + H2

Any  journals  explaining the chemistry involved will  be of great help.

Thanks in advance,

bye ,
Srikanth M Reddy,
Microfabrication group,
Unversity of Louisville,KY


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