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MEMSnet Home: MEMS-Talk: surviving temperature of crosslinked SU-8
surviving temperature of crosslinked SU-8
2003-10-16
LSWANG
2003-10-16
Christopher F. Blanford
2003-10-16
Bill Moffat
2003-10-16
ShuTing Hsu
surviving temperature of crosslinked SU-8
LSWANG
2003-10-16
Hi,
Does anyone have some idea about what is the highest
temperature crosslinked SU-8 structure can stand with
losing the feature resolution. 300C or higher?
thanks
Lisen

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