Hi,

You can try buffered HF. :>

Linda:)

On Fri, 17 Oct 2003, t. hamano wrote:

> Date: Fri, 17 Oct 2003 11:10:35 -0500
> From: t. hamano 
> Reply-To: General MEMS discussion 
> To: [email protected]
> Subject: [mems-talk] Q: Ti wet etching
>
> Hi all!
> I would like to ask you about the recipe of Ti etchant.  We are going to
> etch a <50 nm thick Ti layer on epitaxial barium titanate.  Since this
> material must be unfamiliar with you, you don't forget about it.  I just
> want to know what kinds of etchant you usually fix for Ti etching.
>
> Thanks a lot in advance.
>
> T. Sophie Hamano
>
>
>
>
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