Sidorov Elena,

We offer low stress nitride.  Can you give me more specifications on the
film?

Chris

____________________________________________
Chris Kovach, Ph.D.
Executive Director
The Center for Micro and Nano Processing
The Microfabrication Laboratory
The Electronics Design Center

Case Western Reserve University
10900 Euclid Avenue
Bingham Building, Rm 107A
Cleveland, OH,  44106-7200

Ph: (216) 368-3628
Fax: (216) 368-8738
[email protected]




-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Elena Sidorov -BlueBird
Sent: Tuesday, October 21, 2003 4:10 AM
To: [email protected]
Subject: [mems-talk] Low stress silicon nitride.



Hello,

 I'm looking for a vendors that can deposit >5000A um low stress nitride
for membranes fabrication. Thanks in advance for your information.

Sidorov Elena, BlueBird Optical MEMS


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