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MEMSnet Home: MEMS-Talk: etchant for TiO2
etchant for TiO2
2003-10-21
Rajesh Ramaneti
etchant for TiO2
Rajesh Ramaneti
2003-10-21
Hi there,

I would like to know if somebody can  give info, as to whether
there is an etchant(anisotropic and isotropic) which etches
Titanium dioxide(TiO2) thin films but not Strontium Titanate(SrTiO3)
substrates?


greetings,
Rajesh
reply
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