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MEMSnet Home: MEMS-Talk: platinum over polisilicon
platinum over polisilicon
2003-10-22
Sebastian Sosin
2003-10-22
Mighty Platypus
platinum over polisilicon
Sebastian Sosin
2003-10-22
    I am designing my firs gas sensor and i want to know if it is possible
to deposit platinum over polisilicon in order to make a bonding pad.
    Do I need some other metallic layers between Pt and poli-Si?
    Shoul I deposit Au over Pt for the final contacting stage?
    Where can I find some information for my problem?


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