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MEMSnet Home: MEMS-Talk: what about platinum over silicon dioxide?
what about platinum over silicon dioxide?
2003-10-23
Sebastian Sosin
2003-10-24
Kirt & Erika Zipf-Williams
2003-10-26
Elena Sidorov
what about platinum over silicon dioxide?
Kirt & Erika Zipf-Williams
2003-10-24
> Do I need an adhesion layer before depositing platinum over silicon
dioxide?
Yes. Use 50-200 A of Ti, Cr, or Ti/W.
    --Kirt Williams, Ph.D.   consultant



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