Saurabh,
        My company Yield Engineering Systems manufacture anti-stiction equipment
to overcome this  problem.  The stiction is always present whenever one material
contacts another material especially if there is some moisture or electrostatic
attraction.  Providing a hydrophobic and insulating layer between the parts that
contact.  Contact me directly and I will send you more details.
[email protected] or 408 954 8353  Bill Moffat

-----Original Message-----
From: Saurabh Nishant [mailto:[email protected]]
Sent: Friday, October 24, 2003 4:16 AM
To: [email protected]
Subject: [mems-talk] polysilicon stiction problem


Dear MEMS colleagues,
  I am a student at indian institute of science and facing the problem of
stiction in polysilicon cantilivers after sacrificial layer etching.I would
appreciate if any one can suggest me some means to overcome this problem.I
suspect both the resifual stress and capillary forces are reponsible.Any help
would be highly appreciated.
thanks.

regards
nishant


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