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MEMSnet Home: MEMS-Talk: thin film TiO2 etchant
thin film TiO2 etchant
2003-10-22
ravneet singh
2003-10-24
kris
2003-10-27
Rajesh Ramaneti
thin film TiO2 etchant
Rajesh Ramaneti
2003-10-27
Does this selectively etch TiO2 films grown on substrates
like Silicon and SrTiO3 or does it etch them too?


greetings,
Rajesh



----- Original Message -----
From: "kris" 
To: "General MEMS discussion" 
Sent: Friday, October 24, 2003 5:38 PM
Subject: Re: [mems-talk] thin film TiO2 etchant


> try 1: 50    NH4OH:H2O2
>
>>

reply
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