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MEMSnet Home: MEMS-Talk: Glass wafers
Glass wafers
2003-10-24
Robert Smith
2003-10-28
Paolo Bondavalli
2003-10-28
Holger Becker
2003-10-28
Carsten Wesselkamp
Glass wafers
Paolo Bondavalli
2003-10-28
Dear Robert,
Here some papers:
http://www.infotech.tu-
chemnitz.de/~microtec/eng/press/annualrep00/pdf/special_report5.pdf

http://www.in.umist.ac.uk/MINOS/microtec2000_SJB.pdf
http://www.iop.org/EJ/abstract/0960-1317/8/2/010
Best Regards

Robert Smith a écrit :

> Dear All,
>
> Which glass material (quartz, BSG, etc) is best
> suitable for fabrication of microchannels.  I see many
> different qualities of wafer.
>
> If there is a review article on this subject, let me
> know. Sorry for a naive question. I would appreciate
> your help.
>
> Thanks,
> Bob
>
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--
*********************************************************
Dr. Paolo Bondavalli
R&D Engineer
MICROTEC MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
**********************************************************
Disclaimer: Opinions expressed herein are my own and may
  not represent those of my employer.
**********************************************************



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