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MEMSnet Home: MEMS-Talk: Oxford plasma 80+
Oxford plasma 80+
2003-10-29
[email protected]
Oxford plasma 80+
[email protected]
2003-10-29
Hi,
 I have to work with a Oxford Plasma 80+ RIE machine and I'm looking for others
that use the same equipment to have some process parameters on silicon, silicon
oxide, glass, LINbO3.


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