Generally the tool owner (engineer) will set up calibration
instructions that can be run by the process techs/operators.

-----Original Message-----
From: Lau, Phil (UK) [mailto:[email protected]]
Sent: Thursday, November 06, 2003 6:41 AM
To: [email protected]
Subject: [mems-talk] Monthly MetrologyTool checks...




I'vd been asked to post this question to the mems group,
many whom I suspect are (were) involve in the Silicon Semiconductor
fraternity [industry]:

*******************************************************
>From 'past experience', who is responsible for the
calibration of Metrology tools, eg Linewidth kits,
SEMs, 'Surfscans' systems, etc?

(eg, equipment eng, process technicians or porcess engs).

*******************************************************

Some sort of demographic response would be appreciated.

phil lau




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