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MEMSnet Home: MEMS-Talk: Re: deep trenches in SU-8
Re: deep trenches in SU-8
2003-11-06
Mahavir Sanghavi
Re: deep trenches in SU-8
Mahavir Sanghavi
2003-11-06
Hi Olga,

More details about the process would help pin point, however,
One or more of the following suggestions should work.
1. Try lowering your Post Exposure Bake time.
2. Increase your development time.
3. Use fresh developer.

regards,
-Mahavir

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