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MEMSnet Home: MEMS-Talk: Gold etch without etching copper?
Thin SU-8, SU-8 2002
2003-11-13
Werner Karl
3" sapphire wafer
2003-11-13
Honggang Jiang
2003-11-14
Kirt & Erika Zipf-Williams
2003-11-14
Imran Ghauri
2003-11-16
Danny Klein
2003-11-13
Brubaker Chad
Gold etch without etching copper?
2003-11-14
Linda LW Chow
Gold etch without etching copper?
Linda LW Chow
2003-11-14
HI Everyone,

I have bimetallic layer of copper on top of gold. When I etch gold with
gold etchant, copper is seriously attacked. Do anyone have any good
suggestions of Gold etchant without hurting copper?

Thank you!
Linda:)


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