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MEMSnet Home: MEMS-Talk: In search for another room-temp casting material on silicon
metal? etch mask for TMAH
2003-10-29
Karin Buchholz
2003-10-30
Shile
2003-11-18
Martyna
2003-11-18
Massimiliano Decarli
2003-11-19
David Nemeth
SiO2 sputtering rate
2003-11-21
Oray Orkun Cellek
In search for another room-temp casting material on silicon
2003-11-18
Wei-han J. Wu
In search for another room-temp casting material on silicon
Wei-han J. Wu
2003-11-18
Hi all,

Does anybody know of another room-temperature material that can be cast on
silicon and removed with ease besides PDMS or RTV?  We are trying to replicate
an etched silicon master with PDMS.  We have tried:

1. RTV on silicon master
2. PDMS on RTV negative

Of course the procedure above does not work because PDMS will not cure well on
hardened RTV (same chemical structure.)  Our next resort was:

1. RTV on silicon master
2. Wax on RTV negative
3. Room-temperature slow-setting epoxy on wax positive
4. PDMS on RTV negative.

This procedure yields average results -- the wax, when solidifying, will have
shrink marks on the mating surface.  These shrink marks eventually get captured
in the PDMS.  Not good.  Any advice would be appreciated.  Thanks!

-John Wu
 Comparative Biomechanics Laboratory
 Tufts University



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