A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: fluorocarbon residue removal in silicon DRIE
fluorocarbon residue removal in silicon DRIE
2003-12-05
roberto Campedelli
2003-12-05
Debjyoti Banerjee, Ph.D.
2003-12-08
Sunil Kumar
fluorocarbon residue removal in silicon DRIE
roberto Campedelli
2003-12-05
Hello, did you solve the problem with removing fluorocarbon polymers?

Roberto Campedelli
process engineer STMicroelectronics
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMStaff Inc.
The Branford Group
Addison Engineering