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MEMSnet Home: MEMS-Talk: MEMS Hydrophone.
MEMS Hydrophone.
2003-12-18
[email protected]
MEMS Hydrophone.
[email protected]
2003-12-18
A frequency response specification is a good start, but alone is totally
inadequate when attempting to assess the capabilities of a specific
fabrication technology.  Perhaps the specs listed below will get you off to
a better start.

Nominal Sensitivity (min)..........2.0mV/Pa
Frequency range.....................1.5KHz-15KHz
Noise density (max)................10uPa/sqrt(Hz) from 5KHz to 15KHz
Overpressure...........................40KPa (400mmHg) for 60msec
Operating Temperature.............25-45 degrees C
Directionality...........................Omnidirectional +/-2dB at 15KHz



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