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MEMSnet Home: MEMS-Talk: Ni liftoff help
Ni liftoff help
2004-01-02
Yuzhu Li
2004-01-05
R. Brent Garber (2 parts)
Ni liftoff help
Yuzhu Li
2004-01-02
 sputtered Ni 1500A. I tried  both negative resist(AZnlof, 4um with
overhang) and positive resist(AZ5214, 1.5um), after liftoff, they both
give rough edges: some metal still hang over the edge.why even negative
resist doesn't work? should I use evaperation Ni?




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