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MEMSnet Home: MEMS-Talk: Need Advice on Mems Electrostatic Simulation in Ansys 7.0
Need Advice on Mems Electrostatic Simulation in Ansys 7.0
2004-01-02
Santanu Chandra
Need Advice on Mems Electrostatic Simulation in Ansys7.0
2004-01-04
Zhili Hao
Need Advice on Mems Electrostatic Simulation in Ansys 7.0
Santanu Chandra
2004-01-02
Hi all,
I am having difficulty in simulating a capacitive sensor modelled in Ansys 7.0.
My main concern is measuring the capacitance change for a change in deflection
of two plates.
Can anyone help me understand the process that should be followed to extract the
capacitance after the deformation has occured due to some structural force
acting on one plate.
I can calculate the capacitance using the CMATRIX macro for a static model but I
need suggestion for the coupled analysis of the model. first structural and
thene electrostatic.
I would appreciate if anyone can help me out.
Thanking you




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