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MEMSnet Home: MEMS-Talk: CMP 25um silica, 4" wafer.
CMP 25um silica, 4" wafer.
2004-01-06
Mark M
CMP 25um silica, 4" wafer.
Mark M
2004-01-06
Hi All,

Does anyone know of a CMP vendor who can remove
approx 25um PECVD silica from a 4" wafer.

Thanks,
Mark.

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