Rajan,

In most cases you can hard bake resist for hours and HF will still under
cut.  Cr masks are used more often for a HF mask.

Brent

[email protected] wrote:

> hi all
> can anyone plsease telll me what should be the ideal post bake(hard bake)
> before HF
> etching of silicon iam using PR-SR1813.
> regards
>
> Rajan Malik
> Graduate Student
> Electrical Engg.
> University of south Florida
>
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