A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Aluminum evaporation issues
Aluminum evaporation issues
2004-01-07
Sachin Rane
2004-01-07
Steven F. Nagle
2004-01-08
???
2004-01-13
David Grove
2004-01-08
[email protected]
2004-01-13
Sachin Rane
Aluminum evaporation or Aluminum sparker
2004-01-14
hengcw
2004-01-14
R. Brent Garber (2 parts)
2004-01-16
hengcw
Aluminum evaporation issues
Sachin Rane
2004-01-07
Hi,
I have been trying to make ~ 1-2 micron thick aluminum films by thermal
evaporation. The films I get are typically white in color (non-shiny)
and rough (inspected through AFM). I have used both the boron nitride
crucible and tungsten boat as the source. The pressure at evaporation is
typically 2*10^-6 (before starting evaporation it is < 10^-6 ) What is
the problem? Or is thermal evaporation not a good method for this?
Thanks
SR


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Harrick Plasma, Inc.
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing