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MEMSnet Home: MEMS-Talk: Aluminum evaporation issues
Aluminum evaporation issues
2004-01-07
Sachin Rane
2004-01-07
Steven F. Nagle
2004-01-08
???
2004-01-13
David Grove
2004-01-08
[email protected]
2004-01-13
Sachin Rane
Aluminum evaporation or Aluminum sparker
2004-01-14
hengcw
2004-01-14
R. Brent Garber (2 parts)
2004-01-16
hengcw
Aluminum evaporation issues
[email protected]
2004-01-08
I would suggest you look closely for a leak. Sounds like you are making Al2O3 by
your description. Either crucible should be fine or you can run it without. Good
luck Bob Henderson


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