Hi Iskandar.
            I have been passed your enquiry by another member of the EVG
team. We at EVG make a range of equipment aimed at the MEMS
manufacturing and development market. Check out our Website
www.EVGroup.com  where you will find details of the equipment and access
to the library of technical papers and application notes.
Amongst our equipment are double side mask/bond aligners which are
capable of aligning two wafers to better than a micron.
Of particular interest to yourself will be the aligner already installed
in your engineering dept in Trumpington Street which is capable of
carrying out your requirements, contact there is Andrew Flewitt
If you need any further help contact me on 01239 654034.

Regards

Jan Newman

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newman