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MEMSnet Home: MEMS-Talk: seeing glass alignment keys
seeing glass alignment keys
2004-01-08
ERIC SIMONE
2004-01-09
David Nemeth
2004-01-09
Vic Kley
2004-01-09
[email protected]
seeing glass alignment keys
ERIC SIMONE
2004-01-08
Hello,

An interesting problem has arisen and I was wondering if anyone had any
suggestions. I'm processing on glass chips and the first step is a glass etch.
However, this means that my first set of alignment marks are transparent and I'm
having a hard time finding them with the aligner to line up the next mask. I've
tried darkening them in with a marker but that doesn't seem to help. Any ideas?
Thanks much.

-Eric





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