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MEMSnet Home: MEMS-Talk: seeing glass alignment keys
seeing glass alignment keys
2004-01-08
ERIC SIMONE
2004-01-09
David Nemeth
2004-01-09
Vic Kley
2004-01-09
[email protected]
seeing glass alignment keys
Vic Kley
2004-01-09
Eric

Illuminate the part from the side and the marks should be readilly visible.

Vic
----- Original Message -----
From: "ERIC SIMONE" 
To: 
Sent: Thursday, January 08, 2004 2:51 PM
Subject: [mems-talk] seeing glass alignment keys


> Hello,
>
> An interesting problem has arisen and I was wondering if anyone had any
suggestions. I'm processing on glass chips and the first step is a glass
etch. However, this means that my first set of alignment marks are
transparent and I'm having a hard time finding them with the aligner to line
up the next mask. I've tried darkening them in with a marker but that
doesn't seem to help. Any ideas? Thanks much.
>
> -Eric
>
>
>
>
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