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MEMSnet Home: MEMS-Talk: technical phrase "platen power"
technical phrase "platen power"
2004-01-09
Burkhard Volland
2004-01-09
Neal Ricks
2004-01-09
Steven F. Nagle
2004-01-09
[email protected]
2004-01-09
Michael Marrs
technical phrase "platen power"
Michael Marrs
2004-01-09
The term "platen power" does refer to the bias power. However, terms like
"RF power" and "source power" are not always specific to the cathode or the
ICP and may cause confusion if you are trying to describe one or the other.

Mike Marrs
Trion Technology



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