Based on our recent 48 tests of MUMPs specimens, the observed properties of
phosphorus doped polysilicon are:

* Young's modulus = 169 +/- 6 GPa;
* Poisson's ratio = 0.22 +/- 0.01;
* Tensile Strength = 1.20 +/- 0.15 GPa.

The above data and related testing techniques can be found in our recent
paper, "Measurement of Young's Modulus, Poisson's ratio, and Tensile
Strength of Polysilicon", by William N. Sharpe, Jr., Bin Yuan, Ranji
Vaidyanathan, and Richard L. Edwards, Published in the Proceedings of the
Tenth IEEE Annual International Workshop on Micro Electro Mechanical
Systems, Nagoya, Japan, January 26-30, 1997, pp.  42-429.

Good Luck!

Bin Yuan
Department of Mechanical Engineering
Johns Hopkins University
Baltimore, MD 21218


On Wed, 12 Feb 1997, Jean-Pierre Alfano wrote:

> I am currently working on the finite elements analysis of a MEMS
accelerometer, but to do the calculation I need to know the properties of
polysilicon.
> Could someone of you please inform me on the followings?
> -young modulus
> -poisson ratio
> -mass density
> -thermal expansion coefficient
> -thermal expansion reference temperature
> -structural damping coefficient
> -stress limit for tension
> -stress limit for compression
> -stress limit for shear
> -thermal conductivity
> -emissivity
> -specific heat
> -hardness.
>
> Thanks.
> Best regards.
>
> Jean-Pierre ALFANO
> Research Scholar
> Florida Atlantic University
> Mechanical Engineering Department
> 777, Glades Road
> Boca Raton FL,33432
>
>