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MEMSnet Home: MEMS-Talk: Copper oxide stripping
Copper oxide stripping
2004-01-14
Mark Schvartzman
2004-01-14
Sunil Kumar
2004-01-14
Park, Daniel Sang-Won
2004-01-14
Bill Moffat
Copper oxide stripping
Mark Schvartzman
2004-01-14
Hi All.
Does anybody knows about how we can effectively clean copper pads from its
native oxide by wet stripping? We cannot use no HF based solutions, since we
also have silicon dioxide on the surface that must remain there. Any suggestions
will be welcomed.
Thank you in advance
________________________________________________________________________________
_
______________________
Mark Schvartzman
Process engineer
GWS Photonics Inc.
Paz Towers, 33, Bezalel st.
Ramat-Gan, 52581, Israel
Tel. 972-3-7534440
Cell. 972-58-699748
E-mail: [email protected]


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