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MEMSnet Home: MEMS-Talk: Is Gold etchant an B-HF compatible with Chromium?
Is Gold etchant an B-HF compatible with Chromium?
2004-01-15
delphine meunier
2004-01-15
Jason Viotty
Is Gold etchant an B-HF compatible with Chromium?
delphine meunier
2004-01-15
Hi all,

Did someone know if Gold etchant and B-HF(Titanum etchant) compatible with
chromium and Platinium??

I mean, I have Cr/Pt Pattern, after I have deposited Ti/Au. I would like to
etch ,but wet, first the Gold (Gold etchant like Transene Gold TFA )and
second Titanium (with B-HF), but I don't know if the Cr layer can be
deteriorated. Did someone can help me?

Thank you,

Regards,


Delphine.



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