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MEMSnet Home: MEMS-Talk: How to etch Soda lime glass using BOE technique?
How to etch Soda lime glass using BOE technique?
2004-01-15
ke xianjun
How to etch Soda lime glass using BOE technique?
ke xianjun
2004-01-15
Hi, Everybody:
         I spin coat photoresist shipley1813 on
aluminum film coated on green soda lime glass. After
developing the photoresist, do you think I need to do
Aluminum etching first and then do glass etching(BOE
7:1 from J.T.Baker) or directly do glass etching
without etching aluminum? I have tried these two
processes. But the width of etching line change from
point to point and etching sidewall is very bad? Could
you please give me some suggestion on etching soda
lime glass?

Best Regards!

Xianjun Ke

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