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MEMSnet Home: MEMS-Talk: Questions about Polyimide reflowing
Questions about Polyimide reflowing
2004-01-15
Xiaohui Li
SU-8 hydrophobic? or hydrophilic?
2004-01-16
sokwon Paik
Need help with Polyimide process
2004-01-20
Xiaohui Li
Questions about Polyimide reflowing
Xiaohui Li
2004-01-15
Hi,

Did anyone try to reflow polyimide after patterning?  How does it work?
Is there difficulty in reflowing polyimide?  Is there difference between
photosentive and nonsensitive polyimide?

Would reflowed polyimide be etched away by SU-8 developer?


Thanks a lot,


Xiaohui

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Xiaohui Li  (Frank)                       15 Prospect st. BC509
Electrical Engineering                    New Haven, CT 06520
Yale University                           203-203-4240
[email protected]
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