Dear Arti,
Look at page 90  of "MEMS Reliability Assurance Guidelines for Space
Applications", Brian Stark, Nasa.
Look for this Doc on google, you'll find it.
Bye.


Arti Tibrewala a écrit :

> Dear All, I have a membrane 24 microns thick, 3mm*3mm square. I used
> profilometer to get the deflection on it by applying 40mN force. I got a
> deflection of 40,000microns. I guess its huge and hence maybe its wrong. I
> want to calculate therotically the deflcetion of the membrane. I tried to
> get formula but unfortunately all are for pressure. Do anyone know a formula
> to calculate deflection when force is applied? If yes please let me know.
> Thanks,
> Arti
>
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Dr. Paolo Bondavalli
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